Room Temperature deposition of ZnO and Al:ZnO ultrathin films on glass and PET substrates by DC sputtering Technique

摘要

In the present work, ultrathin films of Zinc oxide (ZnO) and Aluminum dopedzinc oxide (AZO) with 20 nm thick were fabricated at 300 K on glass andPolyethylene terephthalate (PET) substrates by means of directcurrentsputtering method. The structural morphology of the films were analyzed by(XRD) diffractometry. The average transmittance of films deposited on differentsubstrates showed high transparency (over 80%) in the visible spectrum. Theobjective of the present work is to investigate the thicknesses and opticalconstants of ZnO and AZO ultrathin films prepared by DC sputtering onto (glassand PET) substrates using two methods (UV-vis-NIR spectrophotometer andellipsometer (SE) by new amorphous dispersion formula) with comparison to checkand confirm the results that obtained from UV with those obtained from SEmeasurements. The optical constants of films were extracted and compared usingUV and SE techniques in the range of (200- 2200 nm) with increment of 1 nm inorder to confirm the accuracy of the UV and shown an excellent agreement.